000 00328nam a2200133Ia 4500
008 160710s2012 xx 000 0 und d
020 _a9781420055191
082 _a620.5 MAD
100 _aMADOU, M.J
245 _aFANDAMENTALS OF MICROFABRICATION AND TECHNOLOGY V.2
260 _bCRC
_c2012
300 _a656
942 _2ddc
_cB
999 _c68382
_d68382