| 000 | 00352nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 160710s2012 xx 000 0 und d | ||
| 020 | _a9781420055115 | ||
| 082 | _a620.5 MAD | ||
| 100 | _aMADOU, M.J | ||
| 245 | _aFUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY V.1 | ||
| 250 | _aIII | ||
| 260 |
_bCRC _c2012 |
||
| 300 | _a641 | ||
| 942 |
_2ddc _cB |
||
| 999 |
_c68381 _d68381 |
||