000 00277nam a2200133Ia 4500
020 _a9788126517909
082 _a677.028 GHA
100 _aGHANDHI, S.K.
245 _aVLSI FABRICATION PRINCIPLES
250 _aII
260 _bWILEY
_c2009
300 _a834
942 _2ddc
_cB
999 _c65801
_d65801