000 00331nam a2200133Ia 4500
008 160710s2006 xx 000 0 und d
020 _a0387245200
082 _a620.5 LEO
100 _aLEONDES(CT) Ed
245 _aMEMS/NEMS HAND BOOK ;TECHNIQUES AND APPLICATIONS
260 _bSPRINGER
_c2006
300 _a380
942 _2ddc
_cB
999 _c64788
_d64788