000 00338nam a2200133Ia 4500
008 160710s2003 xx 000 0 und d
020 _a0824708512
082 _a621.38152 HOD
100 _aHODES,G
245 _aCHEMICAL SOLUTION DEPOSITION OF SEMI CONDUCTOR FILMS
260 _bMARCELL DEKKAR
_c2003
300 _a376
942 _2ddc
_cB
999 _c64541
_d64541