000 00293nam a2200121Ia 4500
008 160710s2007 xx 000 0 und d
082 _a620.5 OST
100 _aOSTRIKOV, K AND XU, S
245 _aPLASMA-AIDED NANOFABRICATION
260 _bJOHN WILEY
_c2007
300 _a300
942 _2ddc
_cB
999 _c63891
_d63891