000 00291nam a2200121Ia 4500
008 160710s2006 xx 000 0 und d
082 _a670.425 OST
100 _aOSTEN
245 _aOPTICAL INSPECTION OF MICROSYSTEMS
260 _bTAYLOR & FRANCIS
_c2006
300 _a503
942 _2ddc
_cB
999 _c63678
_d63678