000 00323nam a2200133Ia 4500
008 160710s1999 xx 000 0 und d
020 _a0780334477
082 _a621.3815 GYV
100 _aGYVEZ,JPD ED.
245 _aINTEGRATED CURCUIT MANUFACTURABILITY: ....
260 _bIEEE
_c1999
300 _a316
942 _2ddc
_cB
999 _c61585
_d61585