000 00317nam a2200133Ia 4500
008 160710s2006 xx 000 0 und d
020 _a35410253777
082 _a620.5 MAH
100 _aMAHALIK,NP
245 _aMICRO MANUFACTURING & NANO TECHNOLOGY
260 _bSPRINGER
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300 _a468
942 _2ddc
_cB
999 _c61562
_d61562