000 00300nam a2200121Ia 4500
008 160710s2002 xx 000 0 und d
082 _a621.3 TAY
100 _aTAY (F.E.H)
245 _aMATERIALS & PROCESS INTEGRATION FOR MEMS
260 _bKLUWER ACADEMIC
_c2002
300 _a299
942 _2ddc
_cB
999 _c58440
_d58440