000 00278nam a2200109Ia 4500
008 160710s1998 xx 000 0 und d
100 _aHOFFMAN,D.M. AND OTHERS
245 _aHANDBOOK OF VACCUM SCI. AND TECH.
260 _bACADEMIC PRESS
_c1998
300 _a835
942 _2ddc
_cB
999 _c57759
_d57759