000 00318nam a2200121Ia 4500
008 160710s1993 xx 000 0 und d
082 _a621.3815 ZOR
100 _aZORICH,R.
245 _aHAND BOOK OF QUALITY INTEGRATED CIRCUIT MANUFACTURING
260 _bACADEMIC PRESS INC.
_c1993
300 _a564
942 _2ddc
_cB
999 _c51292
_d51292