000 00300nam a2200121Ia 4500
008 160710s1989 xx 000 0 und d
082 _a621.38173 ELL
100 _aELUOTT,DAVID J.
245 _aINTEGRATED CIRCUIT FABRICATION TECH.
260 _bMCGRAW HILL
_c1989
300 _a540
942 _2ddc
_cB
999 _c48355
_d48355