TY  - BOOK
AU  - MAKABE, T
AU  - PETROVIC, Z
TI  - PLASMA ELECTRONICS: APPLICATIONS IN MICROELECTRONIC DEVICE FABRICATION
SN  - 9780750309769
U1  - 621.044 
PY  - 2014///
CY  - NEW DELHI
PB  - TAYLOR & FRANCIS
ER  -